Noncontact 3D shape inspection based on optical ring imaging system

Saburo Okada; Masaaki Imade; Hidekazu Miyauchi; Takashi Miyoshi; Tetsuhiro Sumimoto; Hideki Yamamoto

doi:10.1117/12.263334

20 January 1997 Noncontact 3D shape inspection based on optical ring imaging system

Saburo Okada, Masaaki Imade, Hidekazu Miyauchi, Takashi Miyoshi, Tetsuhiro Sumimoto, Hideki Yamamoto

Proceedings Volume 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II; (1997) https://doi.org/10.1117/12.263334
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

The purpose of this paper is to develop a non-contact profile sensor system which will be able to accurately measure 3D free-form machined metal surfaces. The proposed sensor system has many advantages as compared with conventional measuring systems. First, a new detecting system of optical ring images utilized by rotating image detector is developed to measure 3D profiles in the long measuring range with high accuracy. Second, processing time can be shortened within 0.5 second by using the proposed detecting system. Third, the speckle noise is eliminated effectively by the rotating mechanism. Finally, it is concluded that this sensor system makes it possible to measure the profiles within an accuracy of +/- 50 micrometers in the measuring range of 150 mm. In this paper, the measurement principle of the proposed sensor system is analyzed and the performance of the system is experimentally measured and discussed not only for both diffuse reflection surface and specular reflection surface, but also for reduction of the laser speckle noise which has direct influence on the measurement accuracy.

Citation Download Citation

Saburo Okada, Masaaki Imade, Hidekazu Miyauchi, Takashi Miyoshi, Tetsuhiro Sumimoto, and Hideki Yamamoto "Noncontact 3D shape inspection based on optical ring imaging system", Proc. SPIE 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II, (20 January 1997); https://doi.org/10.1117/12.263334

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KEYWORDS

Sensors

CCD image sensors

Imaging systems

Speckle

3D metrology

Image sensors

Charge-coupled devices

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