Accuracy of traditional ellipsometry and complex ellipsometry-transmission photometry techniques for absorptive-film/transparent-substrate systems

A. M. Kostruba; Orest G. Vlokh

doi:10.1117/12.271824

1 April 1997 Accuracy of traditional ellipsometry and complex ellipsometry-transmission photometry techniques for absorptive-film/transparent-substrate systems

A. M. Kostruba, Orest G. Vlokh

Author Affiliations +

Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271824
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland

Abstract

The new method for the determination of the high absorptive thin film parameters is proposed. This technique consist in the complex ellipsometry + photometry measurements. The comparison of the principal parameters of the proposed technique and the traditional ellipsometry methods is carried out.

Citation Download Citation

A. M. Kostruba and Orest G. Vlokh "Accuracy of traditional ellipsometry and complex ellipsometry-transmission photometry techniques for absorptive-film/transparent-substrate systems", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); https://doi.org/10.1117/12.271824

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