Micromachined accelerometer with a movable-gate-transistor sensing element

Daniel M. Edmans; Adolfo O. Gutierrez; Chris Cormeau; Edward W. Maby; Howard Kaufman

doi:10.1117/12.284530

5 September 1997 Micromachined accelerometer with a movable-gate-transistor sensing element

Daniel M. Edmans, Adolfo O. Gutierrez, Chris Cormeau, Edward W. Maby, Howard Kaufman

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284530
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

The development of a micromachined accelerometer with high frequency response in described. The accelerometer is based on a thin film layer of polysilicon suspended over a field- effect transistor (FET), forming a moveable-gate transistor. The field effect-transistor is designed for depletion-mode operation. Frequency response greater than 20,000 Hz is predicted with analytical models of the cantilever beam structure. Feedback control electrodes are included for closed-loop operation. The force-balance feedback control produces greater dynamic range and frequency response. The mechanical and electrical modeling of the micromachined structure with MEMCAD 3.0 are described. Results of the device modeling based on SUPREM-3 simulations are also included. This model includes the results of a short loop run carried out at MCNC to determine the interface charge in the transistor gate oxide. The anticipated effect of the oxide charge on the threshold voltage of the FET is included.

Citation Download Citation

Daniel M. Edmans, Adolfo O. Gutierrez, Chris Cormeau, Edward W. Maby, and Howard Kaufman "Micromachined accelerometer with a movable-gate-transistor sensing element", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284530

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available