Novel large-area MIS-type x-ray image sensor for digital radiography

Toshio Kameshima; Noriyuki Kaifu; Eiichi Takami; Masakazu Morishita; Tatsuya Yamazaki

doi:10.1117/12.317045

24 July 1998 Novel large-area MIS-type x-ray image sensor for digital radiography

Toshio Kameshima, Noriyuki Kaifu, Eiichi Takami, Masakazu Morishita, Tatsuya Yamazaki

Proceedings Volume 3336, Medical Imaging 1998: Physics of Medical Imaging; (1998) https://doi.org/10.1117/12.317045
Event: Medical Imaging '98, 1998, San Diego, CA, United States

Abstract

We have developed a brand new, large-area X-ray image sensor for Digital Radiography System (DRS). The sensor utilizes a thin film transistor (TFT)/metal insulator semiconductor (MIS)-type photoelectric converter array made from hydrogenated amorphous silicon (a-Si:H). The sensor has 2688 X 2688 pixels at a pitch of 160 micrometer. The active area is 17 inch X 17 inch. The sensor utilizes scintillator coupled to the array. The light generated by X-rays is detected by the MIS-type photoelectric converters, and the resultant signals are scanned out by switching the TFTs. The a-Si TFT/MIS-type photoelectric converter array is characterized by high signal to noise ratio (SNR) and simple fabrication process. We will describe the principle and the performance of the sensor. In addition, we will present some X-ray images of a human subject obtained with this sensor. Dynamic range of the sensor covers most of the exposure range for radiography. SNR is limited almost only by the X-ray photon noise. MTF is sufficient for digital chest radiography. X-ray images have good contrast. The experimental results and obtained images show that the brand new sensor has great advantages for replacing X-ray film. The simple fabrication process of the sensor promises high productivity and low cost of DRS.

Citation Download Citation

Toshio Kameshima, Noriyuki Kaifu, Eiichi Takami, Masakazu Morishita, and Tatsuya Yamazaki "Novel large-area MIS-type x-ray image sensor for digital radiography", Proc. SPIE 3336, Medical Imaging 1998: Physics of Medical Imaging, (24 July 1998); https://doi.org/10.1117/12.317045

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available