Low-debris plasma source produced by high-power laser

Jinquang Lin; Xiaowei Song; Bo Chen; Jianlin Cao

doi:10.1117/12.317924

15 August 1998 Low-debris plasma source produced by high-power laser

Jinquang Lin, Xiaowei Song, Bo Chen, Jianlin Cao

Proceedings Volume 3550, Laser Processing of Materials and Industrial Applications II; (1998) https://doi.org/10.1117/12.317924
Event: Photonics China '98, 1998, Beijing, China

Abstract

Laser-produced plasma is an attractive table-top x-ray source for many applications, such as microscopy and lithography. Soft x-ray conversion efficiency depends strongly on the laser parameters in use and the produced debris with metal target is an intolerable side-effect in some applications. In this paper, we will optimize laser parameters for the yield of soft x-ray, give the experimental results of low debris solid state CO₂ target.

Citation Download Citation

Jinquang Lin, Xiaowei Song, Bo Chen, and Jianlin Cao "Low-debris plasma source produced by high-power laser", Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); https://doi.org/10.1117/12.317924

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available