Paper
9 July 1999 Single-axis piezoceramic gimbal
Garnett C. Horner, Barmac K. Taleghani
Author Affiliations +
Abstract
This paper describes the fabrication, testing, and analysis of a single axis piezoceramic gimbal. The fabrication process consists of pre-stressing a piezoceramic wafer using a high-temperature thermoplastic polyimide and a metal foil. The differential thermal expansion between the ceramic and metal induces a curvature. The pre-stressed, curved piezoceramic is mounted on a support mechanism and a mirror is attached to the piezoceramic. A plot of gimbal angle versus applied voltage to the piezoceramic is presented. A finite element analysis of the piezoceramic gimbal is described. The predicted gimbal angle versus applied voltage is compared to experimental results.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Garnett C. Horner and Barmac K. Taleghani "Single-axis piezoceramic gimbal", Proc. SPIE 3674, Smart Structures and Materials 1999: Industrial and Commercial Applications of Smart Structures Technologies, (9 July 1999); https://doi.org/10.1117/12.351574
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Composites

Ceramics

Metals

Mirrors

Electrodes

Ferroelectric materials

Semiconducting wafers

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