Design and realization of a penny-shaped micromotor

Matthias Nienhaus; Wolfgang Ehrfeld; H. D. Stoelting; Frank Michel; S. Kleen; S. Hardt; Felix Schmitz; T. Stange

doi:10.1117/12.341250

10 March 1999 Design and realization of a penny-shaped micromotor

Matthias Nienhaus, Wolfgang Ehrfeld, H. D. Stoelting, Frank Michel, S. Kleen, S. Hardt, Felix Schmitz, T. Stange

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341250
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

For many applications in rapid growing markets of microproducts, e.g. miniaturized hard disk drives in personal computers, mobile optical scanners, or for the market of consumer electronics, a novel, penny-shaped micromotor was developed at IMM. Designed to provide an output torque of more than 100 (mu) Nm, the permanent magnet motor shows a diameter of 12.8 mm and a height of 1.4mm. Besides the maximum torque and the ultra-flat shape, one further essential design parameter was a construction that allows an easy assembly and is suitable for mass-production. An important contribution to mass production philosophy is the intensive use of microfabrication technologies especially for both, the production of the permanent magnet rings by micro molding and micro compressing techniques and the micro coils by the way of photolithographic batch processes.

Citation Download Citation

Matthias Nienhaus, Wolfgang Ehrfeld, H. D. Stoelting, Frank Michel, S. Kleen, S. Hardt, Felix Schmitz, and T. Stange "Design and realization of a penny-shaped micromotor", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341250

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