Advances and technologies of galvanometer-based optical scanners

Redmond P. Aylward

doi:10.1117/12.351641

2 July 1999 Advances and technologies of galvanometer-based optical scanners

Redmond P. Aylward

Proceedings Volume 3787, Optical Scanning: Design and Application; (1999) https://doi.org/10.1117/12.351641
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This paper will introduce the benefits, operating ranges and recent advances in galvanometer technology for scanning applications. Several different actuator and position detector technologies and designs will be presented. This will include moving iron, moving coil and moving magnet actuators along with several capacitive and optical position detector designs that offer positioning speed as fast as 150 micro-seconds and positioning repeatability/resolution to a single microradian. The performance and system design trade- offs that one should consider during the selection of the appropriate galvanometer technology and the optical systems design will be discussed along with a performance comparison of the galvanometer to other optical scanning technologies.

Citation Download Citation

Redmond P. Aylward "Advances and technologies of galvanometer-based optical scanners", Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); https://doi.org/10.1117/12.351641

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