Large-area thin film preparation by a hybrid scanning laser ablation

You-qing Wang; Xintang Huang; Chengwu An; Qingming Chen; Qiyang Xu; Zhaiguang Li

doi:10.1117/12.361117

8 September 1999 Large-area thin film preparation by a hybrid scanning laser ablation

You-qing Wang, Xintang Huang, Chengwu An, Qingming Chen, Qiyang Xu, Zhaiguang Li

Proceedings Volume 3862, 1999 International Conference on Industrial Lasers; (1999) https://doi.org/10.1117/12.361117
Event: International Symposium on Industrial Lasers, 1999, Wuhan, China

Abstract

In this paper an improved approach of large area superconducting thin film deposition by a hybrid scanning laser ablation is proposed, in which the pulsed laser radiates a target along a specially designed track just like planet-movement trajectory. The calculation results show that the thickness distribution of films is more homogeneous than that with the simple circle scanning ablation, and an optimum dependence of film thickness homogeneity on such parameters as scanning track, and scanning speed etc. is presented. The tentative experimental study indicates the effectiveness of this method.

Citation Download Citation

You-qing Wang, Xintang Huang, Chengwu An, Qingming Chen, Qiyang Xu, and Zhaiguang Li "Large-area thin film preparation by a hybrid scanning laser ablation", Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); https://doi.org/10.1117/12.361117

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