Diffraction patterns and limits of Brewster angle ellipsometry

L. Froehly; Isabelle Verrier; Claude Froehly; Gerald Brun; C. Veillas

doi:10.1117/12.379937

24 March 2000 Diffraction patterns and limits of Brewster angle ellipsometry

L. Froehly, Isabelle Verrier, Claude Froehly, Gerald Brun, C. Veillas

Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379937
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

The Vectorial Modulation Transfer Function (VMTF) calculation will be used for the explanation of diffraction patterns obtained with Brewster ellipsometers. The method used to study these phenomena lays on protection of the incident monochromatic distribution on a basis constituted of monochromatic plane wave components. The first point examined is how the plane wave spectrum could be propagated through a polarizing pate considering the polarization distortions introduced by diffraction. The same calculation is realized for the whole system in order to establish the expression of the whole VMTF. Paraxial approximations are used in order to analyze more easily the reflected beam pattern and to compare it with experimental results. The good agreement between experimental results and model allows a quantitative valuation of index measurement accuracy as a function of the interface mean surface roughness of the experimental sample considering the specular reflection on the homogeneous plane interface. Taking into account the amount of light scatter by the interfaces irregularities it is then possible to specify the theoretical uncertainties limits affecting as well refractive index and refractive index gradients measurements.

Citation Download Citation

L. Froehly, Isabelle Verrier, Claude Froehly, Gerald Brun, and C. Veillas "Diffraction patterns and limits of Brewster angle ellipsometry", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); https://doi.org/10.1117/12.379937

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