Tin Oxide Films On Glass Substrates By A SOL-GEL Technique

R. Puyane; I. Kato

doi:10.1117/12.935518

28 November 1983 Tin Oxide Films On Glass Substrates By A SOL-GEL Technique

R. Puyane, I. Kato

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935518
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

The novel sol-gel technique has been implemented to deposit electroconductive tin oxide films to be used as transparent electrodes, mainly for display applications. Thin films of antimony-doped tin oxide were deposited on several types of glass substrates (soda-lime-silica, borosilicate and fused silica) using a dip-coating procedure. Alcoholic solutions of tin and antimony organometallic compounds were prepared under controlled conditions. The dipcoating procedure is described° in detail as well as subsequent thermal treatments under controlled atmosphere and temperatures up to 630 C. The optical and electrical characteristics of the films were studied as a function of the process parameters, firing conditions and number of coatings. After the subsequent thermal treatments, 2film resistances of about 200 ohms square could be measured corresponding to resistivities of about 10 ohm cm. The films optical transmission was above 80 percent.

Citation Download Citation

R. Puyane and I. Kato "Tin Oxide Films On Glass Substrates By A SOL-GEL Technique", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935518

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