Fabrication of high-performance PZT actuators using microwave and hot-press hybrid sintering process

Hirofumi Takahashi; Kazuaki Kato; Jinhao Qiu; Junji Tani

doi:10.1117/12.420888

21 March 2001 Fabrication of high-performance PZT actuators using microwave and hot-press hybrid sintering process

Hirofumi Takahashi, Kazuaki Kato, Jinhao Qiu, Junji Tani

Proceedings Volume 4235, Smart Structures and Devices; (2001) https://doi.org/10.1117/12.420888
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

It has been shown in our previous work that 28GHz microwave sintering process can improve the performances of piezoelectric actuators. The improved performances include larger output force, higher strength and larger electromechanical coupling factor. The improvement in performances is attributed to the repression of grain growth due to rapid heating and improvement of microstructure because of internal heating. The sintering time was reduced to 1/10 of the time needed for the traditional technology due to the lager power and uniform heating in the microwave sintering process. In this study, the microwave sintering process was combined with hot-press sintering process for further improvement of the performances of PZT actuators and the sintering conditions of the hybrid process were investigated. It has been confirmed that the combination of microwave and hot-press can further improve the performance of sintered PZT actuators by 30%. This process was also successfully used in the sintering of large samples.

Citation Download Citation

Hirofumi Takahashi, Kazuaki Kato, Jinhao Qiu, and Junji Tani "Fabrication of high-performance PZT actuators using microwave and hot-press hybrid sintering process", Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); https://doi.org/10.1117/12.420888

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