Debris-reduced laser machining of polymeric waveguides for optoelectronic applications

Thomas Berden; Ernst-Wolfgang Kreutz; Reinhart Poprawe

doi:10.1117/12.432537

29 June 2001 Debris-reduced laser machining of polymeric waveguides for optoelectronic applications

Thomas Berden, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432537
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

A polymer multilayer was spin coated on a substrate and was structured with pulsed KrF-excimer laser radiation to generate optical waveguides. Ablation rate, surface roughness and wall-angles were determined using white light interferometry, atomic force microscopy and light microscopy. Polymeric waveguides can be used for optical transmission and their properties such as mode propagation and absorption losses were determined with beam diagnosis. However, compared to other structuring techniques absorption losses of the waveguides are high. One reason for this is the formation of debris on the surface of the waveguides during the process of structuring. Therefore, an investigation of the distribution of debris during structuring was conducted. Different types of processing gases and pressures were used to decide which configuration provides a minimum amount of debris. Absorption losses were again determined and successfully decreased after debris reducing strategies were applied.

Citation Download Citation

Thomas Berden, Ernst-Wolfgang Kreutz, and Reinhart Poprawe "Debris-reduced laser machining of polymeric waveguides for optoelectronic applications", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432537

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