Numerical approach for the frequency-shifting analysis of electrostatic micromechanical actuator

Kie-Chan Kwon; Wan-Sul Lee; Bong-Kyu Kim; Ji-Hyon Cho; Sung Kie Youn

doi:10.1117/12.425385

5 April 2001 Numerical approach for the frequency-shifting analysis of electrostatic micromechanical actuator

Kie-Chan Kwon, Wan-Sul Lee, Bong-Kyu Kim, Ji-Hyon Cho, Sung Kie Youn

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425385
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic force and the displacement at the equilibrium. A staggered algorithm is employed to perform the coupled analysis of the electrostatic and elastic fields. The stiffness matrix of the actuator is modified at this equilibrium state. The displacement field is perturbed using an eigenmode profile of the actuator. The configuration change of the actuator due to perturbation modifies the electrostatic field and thus the electrostatic force. The equivalent stiffness matrix corresponding to the perturbation and the change in the electrostatic force is then added to stiffness matrix in order to explain natural frequency shifting. The numerical examples are presented and compared with the experiments in the literatures.

Citation Download Citation

Kie-Chan Kwon, Wan-Sul Lee, Bong-Kyu Kim, Ji-Hyon Cho, and Sung Kie Youn "Numerical approach for the frequency-shifting analysis of electrostatic micromechanical actuator", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425385

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