Bulk micromachined vibrating wheel rate gyroscope

Rong Zhang; Zhongyu Gao; Zhiyong Chen

doi:10.1117/12.444747

15 October 2001 Bulk micromachined vibrating wheel rate gyroscope

Rong Zhang, Zhongyu Gao, Zhiyong Chen

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444747
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

This paper presents a vibrating wheel rate gyroscope fabricated by bulk machining. The structure pattern is symmetrical and has differential detecting capacitor. It weakens the coupling between the driving and sensing modes, restrains the influence of linear acceleration. A so-called 'cosine beam' is designed to reduce the nonlinearity of large amplitude vibration. The structure is fabricated by a bulk process. It is called dissolve wafer process. This process is very simple and can get high aspect ratio. It is in favor of improving the performance of the sensing element. The circuit of the gyroscope consists of two parts: One is the exciting and control circuit, the other is read out circuit. The exciting and control circuit is implemented with phase lock and amplitude control loops. These are dual close control loops. High stability of vibrating amplitude can be achieved with the loops. It is helpful to improve the stability of scale factor. The read out circuit is implemented with a kind of passive switched demodulator circuit. The demodulated signal can be gained directly, which greatly reduce the circuit. The resolution of this circuit is high. The experimental result is given in this paper. In vacuum situation, the resolution of the gyroscope is about 0.03 degree(s)/s (with bandwidth 10Hz).

Citation Download Citation

Rong Zhang, Zhongyu Gao, and Zhiyong Chen "Bulk micromachined vibrating wheel rate gyroscope", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444747

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