Design and simulation of a multifinger micromechanical silicon accelerometer

Jing-Xin Dong; Jun-Hua Qin

doi:10.1117/12.444703

15 October 2001 Design and simulation of a multifinger micromechanical silicon accelerometer

Jing-Xin Dong, Jun-Hua Qin

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444703
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

A kind of micromechanical silicon accelerometer with medium low performance designed for either commercial or military markets is described in this paper. Its sensitive element is a multi-finger micromechanical structure and its sensitive direction is parallel to the proof mass, which is fixed to the base through four folded beams. The accelerometer is simulated through the structural analysis software ANSYS in the paper. The first four modes are obtained. The first mode displays the parallel shift in the horizontal direction of the proof mass plane, which is the needed form of motion. Its harmonic frequency is simulated as 2.521KHz. This paper discusses emphatically the differences of the accelerometerí»s natural frequency and mechanical behavior, caused by the changes of the folded beamí»s parameters, by the method of finite element analysis. In the end, a performance-satisfied accelerometer example is described. The size of its central chip is 1.6mmí+1.0mm, its measuring range is 30g and its resolution is 0.5x10^-3g.

Citation Download Citation

Jing-Xin Dong and Jun-Hua Qin "Design and simulation of a multifinger micromechanical silicon accelerometer", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444703

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