Spatial distribution of atomic hydrogen in diamond deposition

Lifang Dong; Yuhong Zhang

doi:10.1117/12.445719

16 October 2001 Spatial distribution of atomic hydrogen in diamond deposition

Lifang Dong, Yuhong Zhang

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445719
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

In this paper, we studied the spatial distribution of atomic hydrogen in diamond deposition. The number of hydrogen dissociation as a function of the ratio of electric field to gas pressure is given. And the number of hydrogen dissociation as a function of distance from the hot filament is also given here. These results are of great importance to the study of diamond deposited by EACVD.

Citation Download Citation

Lifang Dong and Yuhong Zhang "Spatial distribution of atomic hydrogen in diamond deposition", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445719

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