Notes from the NIST/NRL/SPIE workshop on nanostructure science, metrology, and technology: microelectronics group

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doi:10.1117/12.465494

24 July 2002 Notes from the NIST/NRL/SPIE Workshop on Nanostructure Science, Metrology, and Technology: Microelectronics Group

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Author Affiliations +

Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.465494
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States

Abstract

We believe that the answer is yes. However, given the incredible diversity and richness of the nanoscale world, we felt that it was necessary to devise a working definition in the context of microelectronics.

Citation Download Citation

- - "Notes from the NIST/NRL/SPIE Workshop on Nanostructure Science, Metrology, and Technology: Microelectronics Group", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.465494

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