Widely tunable lasers using MEMS gratings and mirrors

Xu Ming Zhang; J. Li; Ding Yuan Tang; Chao Lu; Ai Qun Liu

doi:10.1117/12.477923

21 January 2003 Widely tunable lasers using MEMS gratings and mirrors

Xu Ming Zhang, J. Li, Ding Yuan Tang, Chao Lu, Ai Qun Liu

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477923
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Tunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed, batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 mm × 1.5 mm is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.

Citation Download Citation

Xu Ming Zhang, J. Li, Ding Yuan Tang, Chao Lu, and Ai Qun Liu "Widely tunable lasers using MEMS gratings and mirrors", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); https://doi.org/10.1117/12.477923

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