Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling

Fawn R. Gass; Jeffrey L. Dohner; Olga Blum Spahn; Ernest J. Garcia; Grant D. Grossetete

doi:10.1117/12.473200

25 July 2003 Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling

Fawn R. Gass, Jeffrey L. Dohner, Olga Blum Spahn, Ernest J. Garcia, Grant D. Grossetete

Author Affiliations +

Proceedings Volume 4986, Physics and Simulation of Optoelectronic Devices XI; (2003) https://doi.org/10.1117/12.473200
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

This report presents modeling and simulation work for analyzing three designs of Micro Electro Mechanical Systems (MEMS) Compound Pivot Mirrors (CPM). These mirrors were made using the polysilicon SUMMiT^TM process. At 75 volts and above, initial experimental analysis of fabricated mirrors showed tilt angles of up to 75 degrees for one design, and 5 degrees for the other two. Nevertheless, geometric design models predicted higher tilt angles. Therefore, a detailed finite element modeling study was conducted to explain why lower tilt angles occurred and if design modifications could bemade to produce higher tilt angles at lower voltages. This study showed that the spring stiffness of the mirrors was too great to allow for desired levels of rotation at lower levels of voltage. To create lower spring stiffness, a redesign is needed.

Citation Download Citation

Fawn R. Gass, Jeffrey L. Dohner, Olga Blum Spahn, Ernest J. Garcia, and Grant D. Grossetete "Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling", Proc. SPIE 4986, Physics and Simulation of Optoelectronic Devices XI, (25 July 2003); https://doi.org/10.1117/12.473200

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