Fabrication of silicon microstructures using a high-energy ion beam

Ee Jin Teo; Minghui Liu; Mark Brian Howell Breese; Emmanuel P. Tavernier; Andrew A. Bettiol; Daniel John Blackwood; Frank Watt

doi:10.1117/12.524314

29 December 2003 Fabrication of silicon microstructures using a high-energy ion beam

Ee Jin Teo, Minghui Liu, Mark Brian Howell Breese, Emmanuel P. Tavernier, Andrew A. Bettiol, Daniel John Blackwood, Frank Watt

Author Affiliations +

Proceedings Volume 5347, Micromachining Technology for Micro-Optics and Nano-Optics II; (2003) https://doi.org/10.1117/12.524314
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

We report an alternative technique which utilizes fast proton or helium ion irradiation prior to electrochemical etching for three-dimensional micro-fabrication in bulk p-type silicon. The ion-induced damage increases the resistivity of the irradiated regions and slows down porous silicon formation. A raised structure of the scanned area is left behind after removal of the un-irradiated regions with potassium hydroxide. The thickness of the removed material depends on the irradiated dose at each region so that multiple level structures can be produced with a single irradiation step. By exposing the silicon to different ion energies, the implanted depth and hence structure height can be precisely varied. We demonstrate the versatility of this three-dimensional patterning process to create multilevel cross structure and free-standing bridges in bulk silicon, as well as sub-micron pillars and high aspect-ratio nano-tips.

Citation Download Citation

Ee Jin Teo, Minghui Liu, Mark Brian Howell Breese, Emmanuel P. Tavernier, Andrew A. Bettiol, Daniel John Blackwood, and Frank Watt "Fabrication of silicon microstructures using a high-energy ion beam", Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); https://doi.org/10.1117/12.524314

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available