Evolution of catadioptric scan optics for wide-field high-resolution applications

John M. Tamkin

doi:10.1117/12.618364

1 August 2005 Evolution of catadioptric scan optics for wide-field high-resolution applications

John M. Tamkin

Proceedings Volume 5873, Optical Scanning 2005; (2005) https://doi.org/10.1117/12.618364
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Most high resolution scanning applications use a rotationally symmetric scan lens and precision motor polygon mirror assemblies or active facet error correction. The realm of passive motion compensation and low-cost motor polygon assemblies tend to be limited to lower-performance systems. The reason for this lies in the symmetry that is broken by tangential beam input to the rotating polygon mirror. An alternative design method is presented, along with examples of application for UV maskless lithography.

Citation Download Citation

John M. Tamkin "Evolution of catadioptric scan optics for wide-field high-resolution applications", Proc. SPIE 5873, Optical Scanning 2005, (1 August 2005); https://doi.org/10.1117/12.618364

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