Design and simulation of an ultrasonic transducer

Zhenxian Yu; Yanru Shi; Hung-Yao Hsu; Lingxue Kong

doi:10.1117/12.638357

5 January 2006 Design and simulation of an ultrasonic transducer

Zhenxian Yu, Yanru Shi, Hung-Yao Hsu, Lingxue Kong

Proceedings Volume 6035, Microelectronics: Design, Technology, and Packaging II; 60351N (2006) https://doi.org/10.1117/12.638357
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

This paper presents a novel ultrasonic transducer which can be used as a liquid ejector to release drug. The ultrasonic transducer is based on the design of a flextensional transducer, which is composed of interdigital piezoelectric rings and a vibration membrane. The device works at an axisymmetric resonant mode to produce maximum amplitude at the center of the vibration membrane in axial direction. For the usage of multi piezoelectric rings, the flexural plate waves can be generated by applying two out-of-phase signals. The power consumption is of primary importance in the design of this device and the usage of single-ring or multi-ring piezoelectric material instead of bulk piezo material can therefore reduce the power consumption. An optimum working frequency, at which least power is required by the device, can be found by the piezoelectric, coupled field capability of the ANSYS/Multiphysics product.

Citation Download Citation

Zhenxian Yu, Yanru Shi, Hung-Yao Hsu, and Lingxue Kong "Design and simulation of an ultrasonic transducer", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 60351N (5 January 2006); https://doi.org/10.1117/12.638357

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