Determination of optical constants and thickness of Nb<sub>2</sub>O<sub>5</sub> optical films from normal incidence transmission spectra

Limei Lin; Fachun Lai; Zhiago Huang; Yan Qu; Rongquan Gai

doi:10.1117/12.674262

9 June 2006 Determination of optical constants and thickness of Nb₂O₅ optical films from normal incidence transmission spectra

Limei Lin, Fachun Lai, Zhiago Huang, Yan Qu, Rongquan Gai

Author Affiliations +

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 614920 (2006) https://doi.org/10.1117/12.674262
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

The optical constants and thickness of Nb₂O₅ optical thin film deposited by a reactive magnetron sputtering technique have been retrieved by all measurement data of the normal incidence transmittance. A computer program written in FORTRAN for determining the refractive index, extinction coefficient and thickness of this film has been developed and tested on two examples. This method can also calculate the optical constants and thickness of the film with a thickness thinner than a quarter wavelength optical thickness. Moreover, the optical constants calculated by this method are more accurate than those calculated by the envelope method. We also suggest that this method should be able to apply to other optical films, such as TiO₂, SiO₂ and Ta₂O₅.

Citation Download Citation

Limei Lin, Fachun Lai, Zhiago Huang, Yan Qu, and Rongquan Gai "Determination of optical constants and thickness of Nb₂O₅ optical films from normal incidence transmission spectra", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614920 (9 June 2006); https://doi.org/10.1117/12.674262

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