Digitalization measurement of structure parameters of optic low-pass filter

Yunchuan Li; Bin Lin; Zhuangfei Wu; Liewei Zhu; Xiangqun Cao

doi:10.1117/12.676417

19 May 2006 Digitalization measurement of structure parameters of optic low-pass filter

Yunchuan Li, Bin Lin, Zhuangfei Wu, Liewei Zhu, Xiangqun Cao

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61501G (2006) https://doi.org/10.1117/12.676417
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A digitalization measurement method of structure parameters of optical low-pass filter (OLPF) is presented in this paper. OLPF which comprises two or three crystal plates is adopted in front of the CCD to reduce aliasing in a digitized image. Transiting a triple plate OLPF, an object of the point-source light can separate into eight points which are imaged in CMOS array. The distance of point to point provides us with the information of thickness of each crystal plate. The accuracy of measurement is better than 0.15μm.

Citation Download Citation

Yunchuan Li, Bin Lin, Zhuangfei Wu, Liewei Zhu, and Xiangqun Cao "Digitalization measurement of structure parameters of optic low-pass filter", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61501G (19 May 2006); https://doi.org/10.1117/12.676417

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