Adaptive vibration-resistant techniques in interferometry based on single-point phase-detecting

Yong He; Lei Chen; Xiaofan Zhang

doi:10.1117/12.676539

23 February 2006 Adaptive vibration-resistant techniques in interferometry based on single-point phase-detecting

Yong He, Lei Chen, Xiaofan Zhang

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61504E (2006) https://doi.org/10.1117/12.676539
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Active vibration-resistant techniques for interferometer are gradually applied to eliminate the effects of environmental disturbance, the mechanic-electronic feedback method is one of the low-cost easy way to fulfill these techniques. The detection of vibration signal is the key part of this method, in this case, a single photodiode is used to detect optical phase of the interference field in order to obtain the vibration signal. Optoelectronic signals concerning with vibration are digitalized and analyzed by DSP, and then a feedback voltage is produced to PZT phase shifter which can compensate the change of optical path difference due to vibration. The principles of each part of this vibration-resistant system are described in detail including the design of electronic processing. Experimental results indicates that this method is an effective way to control the vibration with amplitude-frequency product less than 100 wave*Hz.

Citation Download Citation

Yong He, Lei Chen, and Xiaofan Zhang "Adaptive vibration-resistant techniques in interferometry based on single-point phase-detecting", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504E (23 February 2006); https://doi.org/10.1117/12.676539

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