Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication

Ying Liu; Xiangsu Zhang; Shou Liu

doi:10.1117/12.687899

21 September 2006 Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication

Ying Liu, Xiangsu Zhang, Shou Liu

Author Affiliations +

Proceedings Volume 6355, Advanced LEDs for Solid State Lighting; 63550X (2006) https://doi.org/10.1117/12.687899
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea

Abstract

A simple optical system for generating large-size hexagonal lattice used as the mask for photonic crystal LED fabrication is proposed. The key element in the system is a holographic diffractive optical element consisting of three phase gratings made with holographic means. Under the illumination of a single plane wave, three plane waves can be generated and interfere to form a uniform hexagonal pattern. Theoretical analysis demonstrates that equal intensity of the three plane waves can be obtained if groove depth of the gratings is about 400 nm, which can be achieved by controlling the development time in grating processing. Mask on LED with lattice area up to 15 cm² has been obtained with the method.

Citation Download Citation

Ying Liu, Xiangsu Zhang, and Shou Liu "Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication", Proc. SPIE 6355, Advanced LEDs for Solid State Lighting, 63550X (21 September 2006); https://doi.org/10.1117/12.687899

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available