Fabrication of 45<sup>o</sup>-micro-reflector-ended polymer waveguides using one-step UV embossing technique

Shinmo An; Hyun-Shik Lee; Seung-Gul Lee; Beom-Hoan O; Hyong-Hon Kim; Se-Geun Park; El-Hang Lee

doi:10.1117/12.708665

14 February 2007 Fabrication of 45^o-micro-reflector-ended polymer waveguides using one-step UV embossing technique

Shinmo An, Hyun-Shik Lee, Seung-Gul Lee, Beom-Hoan O, Hyong-Hon Kim, Se-Geun Park, El-Hang Lee

Proceedings Volume 6476, Optoelectronic Integrated Circuits IX; 64760V (2007) https://doi.org/10.1117/12.708665
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

This paper reports on a fabrication method of 45°-mirror-ended polymer waveguide using single-step UV embossing technique. This technique allows us to fabricate an array of twelve channel multimode polymer waveguides having 45°- mirrors during single-step UV embossing process. For the embossing process we have used a 45°-ended silicon waveguide mold. The silicon waveguide mold has a 45° slope prefabricated at the end of each waveguide structure. With this mold, UV embossing is performed to form undercladding and 45° mirror structures simultaneously. And a metal film is coated on the surface of the 45° slope. And then, core polymer is filled and cured by UV irradiation. By using this method, small size of micro mirror structures can be formed during waveguide fabrication process and fabrication steps can be reduced.

Citation Download Citation

Shinmo An, Hyun-Shik Lee, Seung-Gul Lee, Beom-Hoan O, Hyong-Hon Kim, Se-Geun Park, and El-Hang Lee "Fabrication of 45^o-micro-reflector-ended polymer waveguides using one-step UV embossing technique", Proc. SPIE 6476, Optoelectronic Integrated Circuits IX, 64760V (14 February 2007); https://doi.org/10.1117/12.708665

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