Recent developments on the Daresbury Laboratory long trace profiler

A. Gleeson

doi:10.1117/12.733762

20 September 2007 Recent developments on the Daresbury Laboratory long trace profiler

A. Gleeson

Proceedings Volume 6704, Advances in Metrology for X-Ray and EUV Optics II; 67040F (2007) https://doi.org/10.1117/12.733762
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Measurements taken in 2006 using Daresbury Laboratory's long trace profiler on the BESSY P1 'round robin' mirror highlighted a high level of background noise, believed to be principally from a combination of thermal and vibration sources. In addition, long-term thermal drifts within the instrument enclosure negated the benefit of multiple passes for averaging purposes. Further static stability tests on the LPT−V demonstrated noise levels on the slope measurement to be of the order of 0.5 μrad rms over an hour long period. We will demonstrate how the addition of a secondary instrument enclosure has reduced the background noise level in comparison tests to less than 0.1 μrad rms. We will detail the design of new granite supports for the translation beam and reference mirror, which are intended to minimise sources of vibration. Information will be provided regarding the replacement of the CCD detector/filter assembly and we will outline some proposed future developments.

Citation Download Citation

A. Gleeson "Recent developments on the Daresbury Laboratory long trace profiler", Proc. SPIE 6704, Advances in Metrology for X-Ray and EUV Optics II, 67040F (20 September 2007); https://doi.org/10.1117/12.733762

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