Compact 3-degrees of freedom absolute position sensor based on a CCD chip

Leos Urbanek; Thomas Cimprich; Nipun Dave; Fatma Abdelkefi; Jean-Marc Breguet

doi:10.1117/12.754212

10 October 2007 Compact 3-degrees of freedom absolute position sensor based on a CCD chip

Leos Urbanek, Thomas Cimprich, Nipun Dave, Fatma Abdelkefi, Jean-Marc Breguet

Proceedings Volume 6716, Optomechatronic Sensors and Instrumentation III; 67160G (2007) https://doi.org/10.1117/12.754212
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

In this paper, we present a new concept of 3 Degrees Of Freedom (3-DOF) sensors, which are capable of measuring the absolute position X-Y with a resolution less than 0.16μm (defined here as 4σ and σ denotes the standard deviation) and the orientation θ_z (over 360°) with a resolution of 0.48'. The principle of this low-cost and small-size 3-DOF sensor relies on a target with a specific pattern that includes periodic absolute position information that can be used to enhance the position resolution by statistical analysis. Efficient image processing algorithms are applied to improve both the reliability and the resolution of the target positioning and are optimized in term of processing complexity (i.e., time of processing).

Citation Download Citation

Leos Urbanek, Thomas Cimprich, Nipun Dave, Fatma Abdelkefi, and Jean-Marc Breguet "Compact 3-degrees of freedom absolute position sensor based on a CCD chip", Proc. SPIE 6716, Optomechatronic Sensors and Instrumentation III, 67160G (10 October 2007); https://doi.org/10.1117/12.754212

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