Precision measurement for micro size based on support vector regression

Qiuwei He; Longshan Wang; Zhongdang Yu; Qiang Che

doi:10.1117/12.783206

27 November 2007 Precision measurement for micro size based on support vector regression

Qiuwei He, Longshan Wang, Zhongdang Yu, Qiang Che

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67231T (2007) https://doi.org/10.1117/12.783206
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

In order to improve measurement precision and measurement speed for micro size, a new kind of precision measurement method based on support vector regression for micro size parts was put forward. Taking the clip as the study object in this paper to measure micro distance of the clip slot clearance. First, the digital image of the clip was collected by A102FCCD device, and was input into computer by IEEE1394 digital card. Second, the original gray level image with noise was changed into edge information with single-pixel width after it was processed by reducing noise with median filtering, creating a binary image with threshold method and contour extraction, etc. Third, the detected regions were previously determined according to the proportions of clip length and width. Then pixel points on edges in the detected regions made up the training set of corresponding straight line, and the support vector machine for regression(SVR) was trained by the training set and regression function of every detected straight line was obtained, which is the expression of the sub-pixel, and then the clearance distance of clip slot was measured. Measurement precision acquired by support vector regression method is higher than measurement precision acquired by least square linear regression method through experiment contrast. Measurement precision can reach 1.05μm with support vector regression method. Finally, the measurement error was analyzed. Theory analysis and experimental results show that the method proposed is characterized by high speed and high precision.

Citation Download Citation

Qiuwei He, Longshan Wang, Zhongdang Yu, and Qiang Che "Precision measurement for micro size based on support vector regression", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67231T (27 November 2007); https://doi.org/10.1117/12.783206

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KEYWORDS

Image processing

Image segmentation

Precision measurement

Imaging systems

Charge-coupled devices

Error analysis

Calibration

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