Paper
3 April 2008 An electro-mechanically coupled SDOF piezoelectric stack actuator model
Alexander York, Stefan Seelecke
Author Affiliations +
Abstract
Piezoelectric actuators used in nano-positioning devices exhibit highly non-linear behavior and strong hysteresis, which limits the efficiency of conventional non-model-based controllers. This paper presents the first results of a free energy model based on the theory of thermal activation for single crystal piezoceramics that couples mechanical stress and electric field. It is capable of predicting the hysteretic behavior along with the frequency-dependence present in these materials. The model is then coupled with a spring as a first step toward a SDOF model of a commercial nano-positioning stage and is the basis for future control applications. Quasi-static simulations are presented to illustrate the effects of spring loading on the actuator behavior.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander York and Stefan Seelecke "An electro-mechanically coupled SDOF piezoelectric stack actuator model", Proc. SPIE 6926, Modeling, Signal Processing, and Control for Smart Structures 2008, 692608 (3 April 2008); https://doi.org/10.1117/12.776345
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Actuators

Crystals

Device simulation

Polarization

Process control

Signal processing

Smart structures

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