Development of a high performance peristaltic micropump

My Pham; Nam Seo Goo

doi:10.1117/12.775759

26 March 2008 Development of a high performance peristaltic micropump

My Pham, Nam Seo Goo

Proceedings Volume 6931, Nanosensors and Microsensors for Bio-Systems 2008; 69310K (2008) https://doi.org/10.1117/12.775759
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

In this study, a high performance peristaltic micropump has been developed and investigated. The micropump has three cylinder chambers which are connected through micro-channels for high pumping pressure performance. A circular-shaped mini LIPCA has been designed and manufactured for actuating diaphragm. In this LIPCA, a 0.1mm thickness PZT ceramic is used as an active layer. As a result, the actuator has shown to produce large out of plane deflection and consumed low power. During the design process, a coupled field analysis was conducted to predict the actuating behavior of a diaphragm and pumping performance. MEMS technique was used to fabricate the peristaltic micropump. Pumping performance of the present micropump was investigated both numerically and experimentally. The present peristaltic micropump was shown to have higher performance than the same kind of micropump developed else where.

Citation Download Citation

My Pham and Nam Seo Goo "Development of a high performance peristaltic micropump", Proc. SPIE 6931, Nanosensors and Microsensors for Bio-Systems 2008, 69310K (26 March 2008); https://doi.org/10.1117/12.775759

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available