Application of diffractive optical elements for inspection of complicated through holes

Yuri V. Chugui; Yuri A. Lemeshko; Peter S. Zav'yalov

doi:10.1117/12.810014

12 January 2009 Application of diffractive optical elements for inspection of complicated through holes

Yuri V. Chugui, Yuri A. Lemeshko, Peter S. Zav'yalov

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 713332 (2009) https://doi.org/10.1117/12.810014
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

The inspection of geometrical parameters of through holes with different configurations is one of the urgent tasks in industry. The majority of the existing noncontact inspection methods doesn't allow measuring the holes of complicated (noncylindrical) configurations with good performances. Two simple developed methods based on diffractive optical elements (DOEs) make possible to inspect the through holes (with the diameter from 5 to 100 mm) both cylindrical and complicated configurations with acceptable lateral and axial (longitudinal) resolution. First method, based on the scanning of inner hole surface by light ring, takes a mechanical displacement of the inspected article along its axis. The second holes inspection method uses the DOE as the diffractive focuser, which generates N light rings simultaneously along the hole axis with ring spacing &Dgr;z. In this case no need for mechanical displacement of inspected articles, output image contains full measuring information about 3D article hole configuration. We have fabricated some binary DOEs using circular laser writing system CLWS-300, developed and produced at the TDI SIE SB RAS. The obtained results have been used under the development of universal automatic inspection system of nuclear reactors fuel assemblies spacer grids.

Citation Download Citation

Yuri V. Chugui, Yuri A. Lemeshko, and Peter S. Zav'yalov "Application of diffractive optical elements for inspection of complicated through holes", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713332 (12 January 2009); https://doi.org/10.1117/12.810014

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