Profilometry of semiconductor components by two-colour holography with Bi12TiO20 crystals

André Oliveira Preto; Eduardo Acedo Barbosa

doi:10.1117/12.827533

17 June 2009 Profilometry of semiconductor components by two-colour holography with Bi₁₂TiO₂₀ crystals

André Oliveira Preto, Eduardo Acedo Barbosa

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73890R (2009) https://doi.org/10.1117/12.827533
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

We studied the shape measurement of semiconductor components by holography with photorefractive Bi₁₂TiO₂₀ crystal as holographic medium and two diode lasers emitting in the red region as light sources. By properly tuning and aligning the lasers a synthetic wavelength was generated and the resulting holographic image of the studied object appears modulated by cos²-contour fringes which correspond to the intersection of the object surface with planes of constant elevation. The position of such planes as a function of the illuminating beam angle and the tuning of the lasers was studied, as well as the fringe visibility. The fringe evaluation was performed by the four stepping technique for phase mapping and through the branch-cut method for phase unwrapping. A damage in an integrated circuit was analysed as well as the relief of a coin was measured, and a precision up to 10 μm was estimated.

Citation Download Citation

André Oliveira Preto and Eduardo Acedo Barbosa "Profilometry of semiconductor components by two-colour holography with Bi₁₂TiO₂₀ crystals", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73890R (17 June 2009); https://doi.org/10.1117/12.827533

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