Near-field spectroscopy of nanostructures

Zexiang Shen; Yun Ma; Hailong Hu; Johnson Kasim

doi:10.1117/12.855104

29 April 2010 Near-field spectroscopy of nanostructures

Zexiang Shen, Yun Ma, Hailong Hu, Johnson Kasim

Proceedings Volume 7711, Metamaterials V; 77111V (2010) https://doi.org/10.1117/12.855104
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We report a new near-field Raman imaging technique by trapping and scanning a dielectric microsphere over a sample surface in water. This method has a few critical advantages over both aperture and apertureless near-field Raman techniques, such as strong near-field signal, high reproducibility, high resolution and cheap cost. In this method, the laser is focused to a spot smaller than diffraction limit and only the near-field signal is collected. Using this method, we have achieved spatial resolution of 80 nm. This spatial resolution is extremely useful and powerful for a wide range of applications such as the characterization of nanostructures and nano devices. We show the capability of our technique using a series of nanometer sized samples, e.g. device sample with 45 nm poly-Si gates with SiGe stressors, Au nanopatterns and Au nanobowl structures. Besides of the achievement of high resolution, our near-field technique also provides the opportunity to explore the near-field optical response of surface plasmons of metal nanostructures that cannot be attained by far-field spectroscopy.

Citation Download Citation

Zexiang Shen, Yun Ma, Hailong Hu, and Johnson Kasim "Near-field spectroscopy of nanostructures", Proc. SPIE 7711, Metamaterials V, 77111V (29 April 2010); https://doi.org/10.1117/12.855104

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available