A compact micromachined interferometric accelerometer based on diffraction grating

Shuangshuang Zhao; Qiaofen Zhou; Changlun Hou; Jian Bai; Guoguang Yang

doi:10.1117/12.869399

9 November 2010 A compact micromachined interferometric accelerometer based on the diffraction grating

Shuangshuang Zhao, Qiaofen Zhou, Changlun Hou, Jian Bai, Guoguang Yang

Proceedings Volume 7853, Advanced Sensor Systems and Applications IV; 78531Y (2010) https://doi.org/10.1117/12.869399
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

In this paper, a MOEMS accelerometer with integrated-grating-based optical interference detection is presented. The acceleration sensor consists of an integrated grating on a transparent substrate and a mechanical part of a bulk silicon proof mass suspended by cantilevers attached to the silicon support substrate. The proof mass and cantilevers were fabricated with a two-mask process on one silicon-on-insulator (SOI) wafer. A phase sensitive diffractive grating was formed with the grating and the upper surface of the proof mass, which acts as a reflective mirror. Illuminating the grating with coherent light generates a series of diffracted optical beams, whose angles remain fixed, but whose intensities are modulated by the relative distance between the grating and the proof mass. Distance alteration caused by vibratory accelerations, changed the intensities of the diffracted beams, which could be detected by a differential circuit to get the variety of acceleration. Experimental results demonstrated that this MOEMS accelerometer has good performance with sensitivity of 3.63x10⁴V/g and a dynamic range of ±5g.

Citation Download Citation

Shuangshuang Zhao, Qiaofen Zhou, Changlun Hou, Jian Bai, and Guoguang Yang "A compact micromachined interferometric accelerometer based on the diffraction grating", Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 78531Y (9 November 2010); https://doi.org/10.1117/12.869399

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