Integration of a micro-incandescent lamp and an interferometric filter for optical applications

H. Baez; M. I. Alayo

doi:10.1117/12.875183

14 March 2011 Integration of a micro-incandescent lamp and an interferometric filter for optical applications

H. Baez, M. I. Alayo

Proceedings Volume 7940, Oxide-based Materials and Devices II; 79401I (2011) https://doi.org/10.1117/12.875183
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

In this work we propose an integration of two kinds of optical devices: an incandescent micro lamp and an interferometric filter, both fabricated on silicon technology. The micro lamp is based on a chromium micro resistor, working as a lamp filament, embedded between two oxynitride films and self-sustained through the partial silicon substrate etching using KOH solutions. The interferometric filters were fabricated through the deposition of periodically alternated PECVD Si₃N₄ and SiO₂ films whose thicknesses were previously defined by numerical simulations. We present the fabrication of these two devices separately and its integration in a hybrid way. The results demonstrated that light filtering can be obtained on micro-lamps light emission spectrums when integrated with interferometric filters, at the wavelength intervals defined by filter transmittance spectrums. Electrical characterization allowed determining the necessary current to obtain constant and stable light emission from micro lamps. The possibility of integration in a unique process, in a quasi-monolithic integration, is proposed.

Citation Download Citation

H. Baez and M. I. Alayo "Integration of a micro-incandescent lamp and an interferometric filter for optical applications", Proc. SPIE 7940, Oxide-based Materials and Devices II, 79401I (14 March 2011); https://doi.org/10.1117/12.875183

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available