Multilayer coatings for optics in the extreme ultraviolet

Juan I. Larruquert; Manuela Vidal-Dasilva; Sergio García-Cortés; Luis Rodríguez-de Marcos; Mónica Fernández-Perea; José A. Aznárez; José A. Méndez

doi:10.1117/12.888463

18 February 2011 Multilayer coatings for optics in the extreme ultraviolet

Juan I. Larruquert, Manuela Vidal-Dasilva, Sergio García-Cortés, Luis Rodríguez-de Marcos, Mónica Fernández-Perea, José A. Aznárez, José A. Méndez

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Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79952S (2011) https://doi.org/10.1117/12.888463
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

The strong absorption of materials in the extreme ultraviolet (EUV) above ~50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of new materials with low absorption or high reflectance. Lanthanide series was found to be a source of materials with relatively low absorption in this range, where most materials in nature present a strong absorption. Other materials, such as SiO and B, have been found to have interesting properties for applications on EUV coatings. As a result, novel multilayers based on Yb, Al, and SiO have been developed with narrowband performance in the 50-92 nm range. In some cases, the difficulty of developing narrowband coatings in the EUV can be overcome by designing multilayers that address specific purposes, such as maximizing and/or minimizing the reflectance at two or more wavelengths or bands. In this direction, we are working towards the development of coatings that combine a relatively high reflectance in a desired EUV band with a low reflectance in another band, for applications in which the presence of the latter radiation may mask a weak EUV radiation source.

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Juan I. Larruquert, Manuela Vidal-Dasilva, Sergio García-Cortés, Luis Rodríguez-de Marcos, Mónica Fernández-Perea, José A. Aznárez, and José A. Méndez "Multilayer coatings for optics in the extreme ultraviolet", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952S (18 February 2011); https://doi.org/10.1117/12.888463

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KEYWORDS

Multilayers

Reflectivity

Extreme ultraviolet

Absorption

Optical coatings

Gold

Silicon carbide

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