Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate

Rimvydas Gaidys; Birutė Narijauskaitė; Arvydas Palevičius; Giedrius Janušas

doi:10.1117/12.915107

6 February 2012 Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate

Rimvydas Gaidys, Birutė Narijauskaitė, Arvydas Palevičius, Giedrius Janušas

Proceedings Volume 8248, Micromachining and Microfabrication Process Technology XVII; 82480I (2012) https://doi.org/10.1117/12.915107
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

The aim of this paper was to create finite element model of the hot imprint process for analysis of the heating, imprinting and demolding steps. Polycarbonate was modeled as elasto-plastic material, because it was analyzed below glassing temperature. In general, the simulation model and numerical results provide a useful understanding of the fundamental formation mechanism during the hot imprint process and serve as a useful guide for specifying the optimal processing conditions for variety of hot imprint applications.

Citation Download Citation

Rimvydas Gaidys, Birutė Narijauskaitė, Arvydas Palevičius, and Giedrius Janušas "Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate", Proc. SPIE 8248, Micromachining and Microfabrication Process Technology XVII, 82480I (6 February 2012); https://doi.org/10.1117/12.915107

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