Development of NIL processes for PV applications

H. Hauser; N. Tucher; K. Tokai; P. Schneider; Ch. Wellens; A. Volk; S. Barke; C. Müller; Thomas Glinsner; B. Bläsi

doi:10.1117/12.2085754

19 March 2015 Development of NIL processes for PV applications

H. Hauser, N. Tucher, K. Tokai, P. Schneider, Ch. Wellens, A. Volk, S. Barke, C. Müller, Thomas Glinsner, B. Bläsi

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 94230U (2015) https://doi.org/10.1117/12.2085754
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Due to its high resolution and applicability for large area patterning, Nanoimprint Lithography (NIL) is a promising technology for photovoltaic (PV) applications. However, a successful industrial application of NIL processes is only possible if large-area processing on thin, brittle and potentially rough substrates can be achieved in a high-throughput process. In this work, the development of NIL processes using the novel SmartNIL^TM technology from EV Group with a focus on PV applications is described. We applied this tooling to realize a honeycomb texture (8 μm period) on the front side of multicrystalline silicon solar cells leading to an improvement in optical efficiency of 7% relative and a total efficiency gain of 0.5% absolute compared to the industrial standard texture (isotexture). On the rear side of monocrystalline silicon solar cells, we realized diffraction gratings to make use of light trapping effects. An absorption enhancement of up to 35% absolute at a wavelength of 1100 nm is demonstrated. Furthermore, we combined photolithography and NIL processes to introduce features for metal contacts into honeycomb master structures, which initially were realized using interference lithography. As final application, we investigated the realization of very fine contact fingers with prismatic shape in order to minimize reflection losses.

Citation Download Citation

H. Hauser, N. Tucher, K. Tokai, P. Schneider, Ch. Wellens, A. Volk, S. Barke, C. Müller, Thomas Glinsner, and B. Bläsi "Development of NIL processes for PV applications", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94230U (19 March 2015); https://doi.org/10.1117/12.2085754

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KEYWORDS

Nanoimprint lithography

Silicon

Solar cells

Etching

Semiconducting wafers

Photovoltaics

Plasma etching

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