2D stepping microdrive for hyperspectral imaging

Csaba Endrödy; Hannes Mehner; Adrian Grewe; Stefan Sinzinger; Martin Hoffmann

doi:10.1117/12.2178867

21 May 2015 2D stepping microdrive for hyperspectral imaging

Csaba Endrödy, Hannes Mehner, Adrian Grewe, Stefan Sinzinger, Martin Hoffmann

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170K (2015) https://doi.org/10.1117/12.2178867
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

In a novel hyperspectral imaging concept based on confocal chromatic microscopy, a pinhole array (matrix of pinholes) has to be scanned across an intermediate image plane to capture the full object plane. In this paper a two-axis stepping microdrive is presented for the pinhole array (6×7.5×0.2 mm³ of glass, weight 20 mg), featuring a 10 μm step size and a 200 μm displacement range in each direction. With the two-axis stepwise actuation of the pinhole array, the imaged area of the object plane is increased from 7% (fixed pinhole array) up to 89% with actuated array. The two-axis positioning is implemented with a three-axis inchworm motion driven by electrostatic forces. A combination of horizontal and vertical electrostatic actuators are arranged to achieve a precise in-plane actuation of the pinhole array. The microdrive is fabricated with established MEMS technologies and features a size about 1 cm² with 1 mm thickness. The microdrive is capable to position the pinhole array over the displacement range. The array size enables a 1:1 optical imaging on an 8 mm diagonal size CCD. The presented stepping microdrive outperforms existing microsystem solutions with a combination of high payload, large step size, displacement range, and the large optical aperture. Furthermore, the device concept enables the positioning of milligram weights with a highly integrated microsystem.

Citation Download Citation

Csaba Endrödy, Hannes Mehner, Adrian Grewe, Stefan Sinzinger, and Martin Hoffmann "2D stepping microdrive for hyperspectral imaging", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170K (21 May 2015); https://doi.org/10.1117/12.2178867

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