MEMS-based platform optimized for inkjet printing of nano-sized, gas sensitive functional metal oxides to enable the measurement of gas induced changes of the heating power

B. Bierer; J. Kneer; J. Wöllenstein; S. Palzer

doi:10.1117/12.2178976

21 May 2015 MEMS-based platform optimized for inkjet printing of nano-sized, gas sensitive functional metal oxides to enable the measurement of gas induced changes of the heating power

B. Bierer, J. Kneer, J. Wöllenstein, S. Palzer

Author Affiliations +

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 951714 (2015) https://doi.org/10.1117/12.2178976
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

Metal oxide based gas sensors are usually read-out by measuring the overall resistivity of the gas sensitive layer. However, the reaction of the gas species with the metal oxide surface does not only change the electrical conductivity but also effects the required heating power to maintain the layer’s temperature. This change in power consumption may be disregarded when using standard bulk sensor chips due to their overall high thermal mass. Nevertheless, micromachined Si based hotplate devices offer the possibility to measure these effects. Here we present results that have been obtained by using a novel hotplate platform optimized for low power consumption and inkjet printing of nano sized gas sensitive metal oxide particles. The temperature of the gas sensitive layer is controlled via the heater resistance and the power consumption is recorded with a fully automated gas measurement system. To separate changes in the heat conductivity of the gas matrix from the heat of the surface reaction, the measurements have been performed in parallel using hotplates with and without a metal oxide layer deposited onto them. Here layers composed of copper (II) oxide (CuO) have been used to highlight the possibilities of the novel approach. Determining both, the gas dependent resistivity as well as heating power yields two independent sensing quantities from one single device and might be an important cornerstone on the way towards selective metal oxide based gas sensors.

Citation Download Citation

B. Bierer, J. Kneer, J. Wöllenstein, and S. Palzer "MEMS-based platform optimized for inkjet printing of nano-sized, gas sensitive functional metal oxides to enable the measurement of gas induced changes of the heating power", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951714 (21 May 2015); https://doi.org/10.1117/12.2178976

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available