The correction of vibration in frequency scanning interferometry based absolute distance measurement system for dynamic measurements

Cheng Lu; Guodong Liu; Bingguo Liu; Fengdong Chen; Zhitao Zhuang; Xinke Xu; Yu Gan

doi:10.1117/12.2202811

8 October 2015 The correction of vibration in frequency scanning interferometry based absolute distance measurement system for dynamic measurements

Cheng Lu, Guodong Liu, Bingguo Liu, Fengdong Chen, Zhitao Zhuang, Xinke Xu, Yu Gan

Author Affiliations +

Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 96772F (2015) https://doi.org/10.1117/12.2202811
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Absolute distance measurement systems are of significant interest in the field of metrology, which could improve the manufacturing efficiency and accuracy of large assemblies in fields such as aircraft construction, automotive engineering, and the production of modern windmill blades. Frequency scanning interferometry demonstrates noticeable advantages as an absolute distance measurement system which has a high precision and doesn’t depend on a cooperative target. In this paper , the influence of inevitable vibration in the frequency scanning interferometry based absolute distance measurement system is analyzed. The distance spectrum is broadened as the existence of Doppler effect caused by vibration, which will bring in a measurement error more than 103 times bigger than the changes of optical path difference. In order to decrease the influence of vibration, the changes of the optical path difference are monitored by a frequency stabilized laser, which runs parallel to the frequency scanning interferometry. The experiment has verified the effectiveness of this method.

Citation Download Citation

Cheng Lu, Guodong Liu, Bingguo Liu, Fengdong Chen, Zhitao Zhuang, Xinke Xu, and Yu Gan "The correction of vibration in frequency scanning interferometry based absolute distance measurement system for dynamic measurements", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 96772F (8 October 2015); https://doi.org/10.1117/12.2202811

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