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17 March 2023 Planarized THz quantum cascade lasers for broadband coherent photonics
Giacomo Scalari, Urban Senica, Paolo Micheletti, Andres Forrer, Sara Cibella, Guido Torrioli, Martin Franckié, Mattias Beck, Jérôme Faist
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Proceedings Volume PC12440, Novel In-Plane Semiconductor Lasers XXII; PC124400P (2023) https://doi.org/10.1117/12.2648793
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
We present a new integrated photonic platform based on active and passive elements integrated in a double-metal, high confinement waveguide layout planarized with a low-loss polymer. An extended top metallization results in low waveguide losses and improved dispersion, thermal and RF properties, as it enables to decouple the design of THz and microwave cavities. Free-running on-chip quantum cascade laser combs spanning 800 GHz, harmonic states over 1.1 THz and RF-injected broadband incoherent states spanning over nearly 1.6 THz are observed. With a strong external RF drive, actively mode-locked pulses as short as 3 ps can be produced, as measured by SWIFTS. We demonstrate as well passive waveguides with low insertion loss, enabling the tuning of the laser cavity boundary conditions and the co-integration of active and passive components. The same platform is employed to demonstrate dispersion compensated ring combs operating at 3 THz.
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Giacomo Scalari, Urban Senica, Paolo Micheletti, Andres Forrer, Sara Cibella, Guido Torrioli, Martin Franckié, Mattias Beck, and Jérôme Faist "Planarized THz quantum cascade lasers for broadband coherent photonics", Proc. SPIE PC12440, Novel In-Plane Semiconductor Lasers XXII, PC124400P (17 March 2023); https://doi.org/10.1117/12.2648793
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KEYWORDS
Terahertz radiation
Quantum cascade lasers
Photonics
Waveguides
Dispersion
Passive elements
Picosecond phenomena
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