UV anti-reflection coatings grown by plasma-enhanced atomic layer deposition

Zesheng Lin; Meiping Zhu; Chen Song; Tianbao Liu; Tingting Zeng; Jian Sun; Jianda Shao

doi:10.1117/12.2683211

24 November 2023 UV anti-reflection coatings grown by plasma-enhanced atomic layer deposition

Zesheng Lin, Meiping Zhu, Chen Song, Tianbao Liu, Tingting Zeng, Jian Sun, Jianda Shao

Proceedings Volume PC12726, Laser-Induced Damage in Optical Materials 2023; PC127261J (2023) https://doi.org/10.1117/12.2683211
Event: SPIE Laser Damage, 2023, Dublin/Livermore, California, United States

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Abstract

This conference presentation was prepared for Laser Damage, 2023.

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Zesheng Lin, Meiping Zhu, Chen Song, Tianbao Liu, Tingting Zeng, Jian Sun, and Jianda Shao "UV anti-reflection coatings grown by plasma-enhanced atomic layer deposition", Proc. SPIE PC12726, Laser-Induced Damage in Optical Materials 2023, PC127261J (24 November 2023); https://doi.org/10.1117/12.2683211

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