Useful Lithography Parameters

Ebook Topic:
Useful Lithography Parameters

Book: Field Guide to Digital Micro-Optics

Author(s): Bernard C. Kress

Published: 2014

https://doi.org/10.1117/3.1002609.ch137

Abstract

This excerpt gives a succinct explanation of useful lithography parameters.
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KEYWORDS

Lithography

Diffraction

Image processing

Image resolution

Lithographic illumination

Micro optics

Point spread functions

Keywords/Phrases