A Step Height Interferometer with One Nanometer Resolution

A. W. Hartman

doi:10.1117/12.7971942

1 April 1976 A Step Height Interferometer with One Nanometer Resolution

A. W. Hartman

Author Affiliations +

Optical Engineering, Vol. 15, Issue 2, 152180 (April 1976). https://doi.org/10.1117/12.7971942

Abstract

An interferometer is described for the measurement of thin film steps. The instrument is a double-pass polarization interferometer and has a resolution of one nanometer. It is selfcontained and features simplicity in construction and operation. Measurements illustrating its performance are given.

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A. W. Hartman "A Step Height Interferometer with One Nanometer Resolution," Optical Engineering 15(2), 152180 (1 April 1976). https://doi.org/10.1117/12.7971942

Published: 1 April 1976

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