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10 October 2014 Pulsed laser deposition of Al-doped ZnO films on glass and polycarbonate
Kwan Chu Tan, Yen Sian Lee, Seong Ling Yap, Soon Yie Kok, Chen Hon Nee, Wee Ong Siew, Teck Yong Tou, Seong Shan Yap
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Journal of Nanophotonics, Vol. 8, Issue 1, 084091 (October 2014). https://doi.org/10.1117/1.JNP.8.084091
Abstract
Al-doped ZnO (AZO) films were deposited on glass and polycarbonate (PC) at room temperature by using pulsed Nd:YAG laser at 355 nm. AZO thin films were obtained for both substrates at laser fluences from 2 to 5  J/cm2 in O2 partial pressure of 2.1 Pa. The effects of laser fluence on the structural, electrical, and optical properties of the films were investigated. The films with lowest resistivity and highest transmittance have been obtained at 2  J/cm2. The resistivities were 2.29×10−3  Ω cm for AZO on glass and 1.49×10−3  Ω cm for AZO on PC. With increasing laser fluence, the deposited films have lower crystallinity, higher resistivity, and smaller optical bandgap.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Kwan Chu Tan, Yen Sian Lee, Seong Ling Yap, Soon Yie Kok, Chen Hon Nee, Wee Ong Siew, Teck Yong Tou, and Seong Shan Yap "Pulsed laser deposition of Al-doped ZnO films on glass and polycarbonate," Journal of Nanophotonics 8(1), 084091 (10 October 2014). https://doi.org/10.1117/1.JNP.8.084091
Published: 10 October 2014
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Cited by 18 scholarly publications.
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KEYWORDS
Glasses
Zinc oxide
Pulsed laser deposition
Transmittance
Crystals
Thin films
Aluminum
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