Open Access
30 June 2021 Experimental and simulation study of fill-factor enhancement using a virtual guard ring in n+/p-well CMOS single-photon avalanche diodes
Seyed Saman Kohneh Poushi, Hiwa Mahmoudi, Michael Hofbauer, Bernhard Steindl, Kerstin Schneider-Hornstein, Horst Zimmermann
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Abstract

The use of a physical guard ring in CMOS single-photon avalanche diodes (SPADs) based on n  +  /(deep)p-well and p  +  /(deep)n-well structures is a common solution to control the electric field of the SPADs periphery and prevent the premature lateral breakdown. However, this leads to a decrease of the detection efficiency, i.e., the fill-factor, especially when the SPADs size is reduced. Our paper presents an experimental and simulation study on replacing the physical guard ring by a virtual guard ring to improve the fill-factor and the scalability of a n  +    /  p-well SPAD implemented in 0.35-μm pin-photodiode CMOS technology. Accordingly, the optimization of the virtual guard ring and its superiority at downscaling are discussed, and the SPAD scalability in size with respect to the fill-factor is quantified in this technology.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Seyed Saman Kohneh Poushi, Hiwa Mahmoudi, Michael Hofbauer, Bernhard Steindl, Kerstin Schneider-Hornstein, and Horst Zimmermann "Experimental and simulation study of fill-factor enhancement using a virtual guard ring in n+/p-well CMOS single-photon avalanche diodes," Optical Engineering 60(6), 067105 (30 June 2021). https://doi.org/10.1117/1.OE.60.6.067105
Received: 29 December 2020; Accepted: 7 June 2021; Published: 30 June 2021
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Virtual reality

Acquisition tracking and pointing

Plasma display panels

CMOS technology

TCAD

Avalanche photodiodes

Optical engineering

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